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Handbook of Plasma Processing Technology

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Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Details

ISBN: 9780815512202
Authors: Jerome J. Cuomo, Stephen M. Rossnagel, William D. Westwood
Language: Rom?n?
Publication Year: 1990
Format: Hardcover
Publisher: Elsevier Science
Pages: 546
Weight: 860gr

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