Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics
synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies.
The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications.
Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials.
This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.
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