Surface Metrology for Micro- and Nanofabrication
presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components.
This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers.
In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
Recenzii
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