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Coperta cărții "Surface Metrology for Micro- and Nanofabrication" de autor necunoscut

Surface Metrology for Micro- and Nanofabrication

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Description

Surface Metrology for Micro- and Nanofabrication

presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components.

This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers.

In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Details
  • ISBN: 9780128178508
  • Authors: Wei Gao
  • Language: Rom?n?
  • Publication Year: 2020
  • Format: Paperback
  • Publisher: Elsevier Science
  • Pages: 448
  • Weight: 910gr

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